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发明名称
SEMICONDUCTOR MEMORY DEVICE HAVING A SIDE WALL FILM AND METHOD OF PRODUCING THE SAME
摘要
申请公布号
KR920006754(B1)
申请公布日期
1992.08.17
申请号
KR19880014844
申请日期
1988.11.11
申请人
FUJITSU LTD.
发明人
EMA, TAICHI
分类号
H01L21/3205;H01L21/8242;H01L27/10;H01L27/108;(IPC1-7):H01L27/10
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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