APPARATUS FOR GENERATING MOLECULAR BEAM,申请号JP19900408163-传众专利搜索

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发明名称	APPARATUS FOR GENERATING MOLECULAR BEAM
摘要
申请公布号	JPH04228493(A)	申请公布日期	1992.08.18
申请号	JP19900408163	申请日期	1990.12.27
申请人	FUJITSU LTD	发明人	KAWACHI TETSUYA;TANAKA MASAHIRO;UEDA TOSHIYUKI;WATANABE YOSHIO;OZAKI KAZUO
分类号	C30B23/08;H01L21/203	主分类号	C30B23/08
代理机构		代理人
主权项
地址

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