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经营范围
发明名称
DEVICE FOR FORMING THIN FILM
摘要
申请公布号
JPH04232256(A)
申请公布日期
1992.08.20
申请号
JP19900415432
申请日期
1990.12.28
申请人
NIPPON MINING CO LTD;HITACHI LTD
发明人
SAWADA SUSUMU;ANAMI JUNICHI;SUMIYA YOSHITAKA;YAMAMOTO MASASHI;KANAO SHINICHI;SAWARA MASASHI
分类号
C23C14/24;C23C16/22
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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