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发明名称
DRY-ETCHING METHOD
摘要
申请公布号
JPH04258117(A)
申请公布日期
1992.09.14
申请号
JP19910040966
申请日期
1991.02.12
申请人
SONY CORP
发明人
YANAGIDA TOSHIHARU
分类号
H01L21/302;H01L21/3065;H01L21/311;H01L21/768
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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