| 摘要 |
PURPOSE:To carry out alarming operation due to abnormality and the like of apparatuses surely and prohibit unnecessary alarming operation to improve the usability of a low-temperature chamber. CONSTITUTION:The inside temperature of a low-temperature chamber 1 is controlled at a temperature between the upper limit temperature of +2 deg.C and the lower limit temperature of -2 deg.C. When the temperature of the low- temperature chamber 1 has become higher than +10 deg.C, a temperature alarming device 6 outputs an alarming output from the external output 8 of alarming. When a mask switch 3 is operated, the temperature alarming device 6 does not output alarming even when the inside temperature of the low-temperature chamber 1 has risen during a predetermined period of time after the operation of the mask switch 3. |
