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发明名称	ION IMPLANTATION DEVICE
摘要
申请公布号	JPH0525629(A)	申请公布日期	1993.02.02
申请号	JP19910203805	申请日期	1991.07.18
申请人	TEL VARIAN LTD	发明人	NAKADA TETSUO
分类号	C23C14/48;C23C14/50;H01J37/317;H01L21/265	主分类号	C23C14/48
代理机构		代理人
主权项
地址

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