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经营范围
发明名称
SUBSTRATE TRANSPORT APPARATUS
摘要
申请公布号
JPH0592804(A)
申请公布日期
1993.04.16
申请号
JP19910251806
申请日期
1991.09.30
申请人
TOSHIBA LIGHTING & TECHNOL CORP
发明人
YAMAZAKI YASUYOSHI;SUGIURA SHUNZO;TANAKA SATORU
分类号
B65G13/12;B65H5/06;H05K13/02
主分类号
B65G13/12
代理机构
代理人
主权项
地址
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