| 摘要 |
PROBLEM TO BE SOLVED: To achieve high beam irradiation efficiency by reducing beam loss due to collision of particle beams against a transmission window frame and suppressing heat generation.SOLUTION: An array type particle beam irradiation device has a two-pole type structure with no draw-out electrode, which is composed of a large number of cathode groups 10 disposed in an array form and anodes 12, Wehnelts 14 electrically connected to the cathode groups 10, and position adjustment mechanisms 16, 18 for advancing-retreating at least two out of the cathode groups 10, the anodes 12 and the Wehnelts 14. Particle beams released from each cathode of the cathode groups 10 are set so as to be converged or go straight, and transmission windows 20 having the same shape as that of each cathode of the cathode group 10 are relatively disposed. |
