PLASMA CVD DEVICE,申请号JP19910302463-传众专利搜索

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发明名称	PLASMA CVD DEVICE
摘要
申请公布号	JPH05112871(A)	申请公布日期	1993.05.07
申请号	JP19910302463	申请日期	1991.10.21
申请人	KOKUSAI ELECTRIC CO LTD	发明人	YAZAWA HIDEO
分类号	C23C16/50;C23C16/52;H01L21/205	主分类号	C23C16/50
代理机构		代理人
主权项
地址

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