| 摘要 |
A laser beam emitted from a light source is transformed into a parallel beam by a collimator lens, and then reflected by a polarization beam splitter. Thereafter, the beam passes through a lambda /4 plate, and is converged onto a sample plane by an objective lens. The light beam from the sample plane passes through the objective lens, the lambda /4 plate and the polarization beam splitter, and entering into an image-forming lens. The image-forming lens comprises a convex lens and a concave lens. The focal length of the image-forming lens is long. Thus, the diameter of the airy disk of the beam converged by the image-forming lens is larger than that of a beam converged at a common focal point by a single convex lens. The converged beam passes through an aperture and enters into a photoelectric detector element which outputs a signal indicative of the intensity of the received beam. An image-forming unit forms an image of the sample plane on the basis of signals from the photoelectric detector element and a scanning unit, and the image is displayed on the display device.
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