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发明名称
FORMING METHOD FOR SINGLE-CRYSTAL SEMICONDUCTOR THIN FILM
摘要
申请公布号
JPH05335233(A)
申请公布日期
1993.12.17
申请号
JP19920162196
申请日期
1992.05.27
申请人
SANYO ELECTRIC CO LTD
发明人
KAWAI KAZUHIKO
分类号
H01L21/20;H01L21/265;H01L27/12;(IPC1-7):H01L21/20
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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