发明名称 RANGE FINDER DEVICE
摘要 PURPOSE:To increase the measurement range without increasing the mirror surface length of a traveling mirror in a range finder device. CONSTITUTION:A plurality of interference type range finder means 12, 13, and 14 opposing one traveling mirror 8 are aligned while they are separated by a short spacing L1 (=L2=L3=L4) for the length of a mirror surface in traveling direction and the interference type range finder means 12, 13, and 14 are switched according to the move of the traveling mirror 8, thus expanding the measurement range of distance to the mirror surface over a wire range for the mirror surface length of the traveling mirror 8.
申请公布号 JPH0669099(A) 申请公布日期 1994.03.11
申请号 JP19920242677 申请日期 1992.08.18
申请人 NIKON CORP 发明人 NARA KEI;MATSUURA TOSHIO
分类号 G03F9/00;G01B11/00;G03F7/20;H01L21/027;H01L21/30;(IPC1-7):H01L21/027 主分类号 G03F9/00
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