| 摘要 |
PURPOSE:To provide the novel inhibitor of dissolution of the pattern-forming material in an aqueous solution of alkali and a pattern-forming material comprising this inhibitor as one of its main component. CONSTITUTION:This dissolution inhibitor is characterized by having 1-3 tert- amyloxycarbonyl groups and a molecular weight of 100-1000, and comprising compounds insoluble in an aqueous solution of alkali. The pattern-forming material of this invention is characterized by comprising, as main components, 100 pts.wt. of the dissolution inhibitor, and 50-1000 pts.wt. of a polymer soluble in the aqueous solution of alkali and having a molecular weight of 2,000-60,000, and 1-60 pts.wt. of a compound to be allowed to release an acid by irradiation with light or ionizing radiation. |
