| 摘要 |
PURPOSE:To enhance sensitivity, resolution, dimensional fidelity, focus allowance, and the like by incorporating an alkali-soluble novolak resin and a specified quinonediazido compound. CONSTITUTION:This resin composition contains the alkali-soluble novolak resin and the quinonediazido compound having repeating units each represented by formula I in which R<1> is 1-10C alkyl or 1-7C alkoxy or the like; each of R<2> and R<3> is H or 1-10C alkyl or the like; and each of m and n is an integer of 0-3 and 1-3, respectively, and m+n<=4. The quinonediazido compound has a weight average molecular weight Mw of <=4000 in terms of standard polystyrene by GPC, and a ratio of Mw to a number average molecular weight Mn, Mw/Mn (dispersion degree) is <=2.5. The average condensation degree of the quinonediazidosulfonyl group to hydroxyl group corresponds to that of the phenol resin in which the area ratio of a one-ring component and a two-ring component to the total elution components is <15% and the quinonediazidosulfonic acid. The average condensation degree of the quinonediazido sulfonyl group is <=75%. |
