SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor device having high integration.SOLUTION: A semiconductor device comprises a substrate, a prismatic insulator and a memory cell string having a plurality of transistors connected in series. The prismatic insulator is arranged on the substrate; and the memory cell string is arranged on a lateral face of the prismatic insulator; and the plurality of transistors each has a gate insulator and a gate electrode; and the gate insulator has a first insulator, a second insulator and a charge storage layer; and the charge storage layer is arranged between the first insulator and the second insulator.SELECTED DRAWING: Figure 1