| 摘要 |
PROBLEM TO BE SOLVED: To provide a composition high in purity of methane fluoride.SOLUTION: There is provided a manufacturing method of methane fluoride including a process of thermodecomposition of fluorine-containing methyl ether represented by the formula (1) in presence of an alumina catalyst to obtain a mixed gas containing methane fluoride and acid fluoride, where the alumina catalyst has a chlorine content set at 1.0 wt.% or less to suppress a side reaction. (1), where Rand Rare each independently substituted/unsubstituted, linear/branched monovalent aliphatic hydrocarbon group, monovalent aromatic hydrocarbon group or monovalent cyclic aliphatic hydrocarbon group, a hydrogen atom or a halogen atom.SELECTED DRAWING: None |
