发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD
摘要 The present invention relates to a semiconductor device, and more specifically, a semiconductor device in which a main current flows in a direction of the thickness of a semiconductor substrate. An object of the present invention is to provide a semiconductor device where a main current flows in a direction of the thickness of a semiconductor substrate that enables to attain desirable electric characteristics. In order to achieve the above object, P type semiconductor regions (912) and N type semiconductor regions (913) are alternately provided with an interval therebetween, both regions in a surface of a second main surface (MS2) of a semiconductor substrate (901). Between the P type semiconductor regions and the N type semiconductor regions, trenches formed in the surface of the semiconductor substrate (901) is filled with insulators (914), thereby forming trench isolation structures (911). Moreover, a second main electrode (916) is formed in contact with both the P type semiconductor regions (912) and the N type semiconductor regions (913).
申请公布号 EP1630872(B1) 申请公布日期 2016.12.28
申请号 EP20030736055 申请日期 2003.06.05
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 Tokuda, Norifumi;Kusunoki, Shigeru
分类号 H01L29/739;H01L21/331;H01L29/06;H01L29/08 主分类号 H01L29/739
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