LIGHT SOURCE DEVICE AND INSPECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To improve an SN ratio of a light source device having a light source that emits incoherent light.SOLUTION: A light source device 13 includes; a light source 131 that emits incoherent light; an optical amplifier 133 located in a light path of the incoherent light and configured to amplify the incoherent light; and a BEF 134 located in the light path of the incoherent light and configured to selectively reduce intensity of a wavelength band that includes a wavelength corresponding to a peak of intensity of the incoherent light to increase a wavelength width of an intensity distribution of the incoherent light.SELECTED DRAWING: Figure 2