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发明名称
Wafer production method
摘要
申请公布号
EP2859985(B1)
申请公布日期
2016.12.28
申请号
EP20140188186
申请日期
2014.10.08
申请人
Siltectra GmbH
发明人
Richter, Jan
分类号
B23K26/00;B23K26/40;B28D5/00;H01L21/268;H01L31/18
主分类号
B23K26/00
代理机构
代理人
主权项
地址
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