发明名称 |
PHOTOCURABLE COMPOSITION AND METHODS FOR OPTICAL COMPONENT BY USING THE SAME |
摘要 |
An imprint method that uses a condensable gas process has a problem in that the surface of a resist cured film is rough. This is resolved by a photocurable composition used for performing imprint in an atmosphere containing a condensable gas. The photocurable composition contains a component (A) which is a (meth)acrylate monomer, a component (B) which is a photopolymerization initiator, and a component (C) which is a mold releasing agent. A saturated solubility of the component (C) in the condensable gas at 5 degrees (Celsius) and 1 atm is 5% by weight or less, the condensable gas being in a liquid state at 5 degrees (Celsius) and 1 atm. |
申请公布号 |
EP3000121(A4) |
申请公布日期 |
2016.12.28 |
申请号 |
EP20140818475 |
申请日期 |
2014.06.19 |
申请人 |
Canon Kabushiki Kaisha |
发明人 |
YONEZAWA, Shiori;ITO, Toshiki;YAMASHITA, Keiji;CHIBA, Keiko;KAWASAKI, Youji |
分类号 |
H01L21/027;B29C59/02;C08F2/44;C08F2/50;C08F20/50;C08K5/05 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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