发明名称 |
INTEGRATED TIME-BASED OPTICAL READ OUT MEMS SENSOR AND METHOD THEREFOR |
摘要 |
Systems and methods for a time-based optical pickoff for MEMS sensors are provided. In one embodiment, a method for an integrated waveguide time-based optical-pickoff sensor comprises: launching a light beam generated by a light source into an integrated waveguide optical-pickoff monolithically fabricated within a first substrate, the integrated waveguide optical-pickoff including an optical input port, a coupling port, and an optical output port; and detecting changes in an area of overlap between the coupling port and a moving sensor component separated from the coupling port by a gap by measuring an attenuation of the light beam at the optical output port, wherein the moving sensor component is moving in-plane with respect a surface of the first substrate comprising the coupling port and the coupling port is positioned to detect movement of an edge of the moving sensor component. |
申请公布号 |
EP3109644(A1) |
申请公布日期 |
2016.12.28 |
申请号 |
EP20160174671 |
申请日期 |
2016.06.15 |
申请人 |
Honeywell International Inc. |
发明人 |
HORNING, Robert D.;LODDEN, Grant |
分类号 |
G01P15/093;B81B5/00;G01C19/5621;G01C19/5656;G01C25/00;G01P15/08;G01P21/00 |
主分类号 |
G01P15/093 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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