发明名称 |
TIME-OF-FLIGHT SPECTROMETRY AND SPECTROSCOPY OF SURFACES |
摘要 |
Described is an analytical method and apparatus for counting and measuring the flight time of secondary electrons, secondary ions and neutrals, scattered ions and/or neutrals and for correlating coincidences between these while maintaining a continuous un-pulsed, micro-focused, primary particle beam for impinging a surface for purposes of microprobe imaging and microanalysis. |
申请公布号 |
EP2507815(A4) |
申请公布日期 |
2016.12.28 |
申请号 |
EP20100834039 |
申请日期 |
2010.11.30 |
申请人 |
Ionwerks, Inc. |
发明人 |
SCHULTZ, J., Albert;EGAN, Thomas, F.;ULRICH, Steven, R.;WATERS, Kelley, L. |
分类号 |
H01J49/00;G01N23/225;H01J49/14 |
主分类号 |
H01J49/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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