| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic actuator capable of correcting a movement of a mover to a predetermined direction when one surface of a substrate is inclined to a horizontal plane.SOLUTION: An electrostatic actuator comprises a stator having a substrate having one plane and the other plane and a plurality of first linear electrodes provided independently on the one plane of the substrate and arrayed in parallel to each other, and a mover arranged on the stator, the first linear electrodes each including a first electrode part extending in a first direction on the one plane of the substrate and a second electrode part extending in a second direction different from the first direction from one end of the first electrode part on the one plane of the substrate.SELECTED DRAWING: Figure 2 |
