发明名称 |
Functionalized monolayers for carbon dioxide detection by a vibrating beam |
摘要 |
A resonant nanosensor apparatus associated with a functionalized monolayer for detecting carbon dioxide and a method of forming the same. A wafer including a sensing vibrating beam and a reference vibrating beam may be functionalized with a functional group in order to form a sensing self monolayer. The sensing self assembled monolayer may be configured by bridging oxygen or carbon atoms covalently bonded with respect to the vibrating beams. A liquid solution of hydrochloric acid may then be applied to the sensing self assembled monolayer at the surface of the reference beam by a direct printing process to obtain a reference monolayer. The liquid solution of HCl transforms the functional groups responsible for the carbon dioxide detection into protonated groups, which do not react with carbon dioxide, but possess visco-elastic properties similar to that of the sensing monolayer. |
申请公布号 |
EP2327983(B1) |
申请公布日期 |
2016.12.28 |
申请号 |
EP20100186609 |
申请日期 |
2010.10.05 |
申请人 |
Honeywell Romania SRL |
发明人 |
Serban, Bogdan-Catalin;Cobianu, Cornel;Mihaila, Mihai N.;Dumitru, Viorel-Georgel |
分类号 |
G01N29/02;B81B3/00;G01N27/00;G01N29/036;G01N29/30;G01N33/00 |
主分类号 |
G01N29/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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