MEMS device front-end charge amplifier

摘要

This document discusses, among other things, apparatus and methods for a front-end charge amplifier. In certain examples, a front-end charge amplifier for a microelectromechanical system (MEMS) device can include a charge amplifier configured to couple to the MEMS device and to provide sense information of a proof mass of the MEMS device, a feedback circuit configured to receive the sense information and to provide feedback to an input of the charge amplifier, and wherein the charge amplifier includes a transfer function having a first pole at a first frequency, a second pole at a second frequency, and one zero at a third frequency.

主权项

1. An apparatus comprising:
a charge amplifier configured to couple to a microelectromechanical system (MEMS) device and to provide sense information of a proof mass of the MEMS device; a feedback circuit configured to receive the sense information and to provide feedback to an input of the charge amplifier; and wherein the charge amplifier includes a transfer function having a first pole at a first frequency, a second pole at a second frequency, and one zero at a third frequency; and wherein the first frequency and the second frequency are at or below a resonance frequency of the proof mass.