Electron beam imaging with dual Wien-filter monochromator

摘要

One embodiment relates to a dual Wien-filter monochromator. A first Wien filter focuses an electron beam in a first plane while leaving the electron beam to be parallel in a second plane. A slit opening allows electrons of the electron beam having an energy within an energy range to pass through while blocking electrons of the electron beam having an energy outside the energy range. A second Wien filter focuses the electron beam to become parallel in the first plane while leaving the electron beam to be parallel in the second plane. Other embodiments, aspects and features are also disclosed.

主权项

1. An electron beam imaging apparatus comprising:
an emitter-source tip that emits electrons; a gun electron lens that focuses the electrons to form an electron beam that is parallel in that the electron beam has electron trajectories that are parallel; a first Wien filter that focuses the electron beam in a first plane while leaving the electron beam to be parallel in a second plane; a slit opening of a slit aperture, wherein the slit opening has a width in the first plane and a length in the second plane, and wherein the width is narrower than the length; and a second Wien filter that focuses the electron beam to become parallel in the first plane while leaving the electron beam to be parallel in the second plane.