| 摘要 |
PROBLEM TO BE SOLVED: To provide an electromechanical conversion element having a crackless electromechanical conversion film in which decrease in the amount of deformation over time can be suppressed during continuous driving for repeating application of a predetermined drive voltage.SOLUTION: An electromechanical conversion film 24 is a polycrystalline film where the {100} plane is oriented preferentially, and at least two out of a plurality of separated diffraction peaks in the diffraction peaks derived from the {200} plane or {400} plane obtained by θ-2θ measurement of X-ray diffractometry for the electromechanical conversion film 24 attribute, respectively, to a-domain structure X1 and c-domain structure Y1 of tetragonal, and when assuming the areas of diffraction peak attributing, respectively, to the a-domain structure X1 and c-domain structure Y1 of tetragonal are Sa and Sc, the Sc/(Sa+Sc) is 20% or less.SELECTED DRAWING: Figure 1 |
