发明名称 MASK FRAME ASSEMBLY FOR THIN LAYER DEPOSITION, MANUFACTURING METHOD OF THE SAME AND MANUFACTURING METHOD OF DISPLAY DEVICE THERE USED
摘要 An embodiment of the present invention relates to a mask frame assembly which is mounted on or detachable from the substrate transferred by a clamper in a deposition process. The mask frame assembly comprises: a mask which has a pattern hole for penetrating a deposition material; a frame which includes a clamping groove which faces a first direction and supports both ends of the mask and allows the entrance of a clamper, a first support part which is adjacent to the clamping groove and has a support groove with a preset depth, and a second support part which faces a second direction crossing the first direction and is connected to a first support part. So, adhesion between the mask and the frame can be improved.
申请公布号 KR20160107405(A) 申请公布日期 2016.09.19
申请号 KR20150029853 申请日期 2015.03.03
申请人 SAMSUNG DISPLAY CO., LTD. 发明人 LEE, SANG SHIN
分类号 H01L51/56;H01L21/02 主分类号 H01L51/56
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