| 摘要 |
PROBLEM TO BE SOLVED: To provide a plane traveling device capable of positioning an object with high accuracy by use of a piezo element and having high load endurance performance in a vertical direction.SOLUTION: A plane traveling device 1 includes: a first table 10; a piezo stage 20 having a base part 21 and a traveling part 22 disposed above the first table 10, in which the traveling part 22 is configured to horizontally travel with respect to the base part 21 by a drive force of a piezo element; a second table 30 disposed above the piezo stage 20; a connecting member 40 configured to connect the first table 10 and the second table 30 and to allow horizontal traveling of the second table 30 with respect to the first table 10; and drive force transmitting means 50 for transmitting the drive force of the piezo element of the piezo stage 20 to the second table 30 so as to interlock the second table 30 with the traveling part 22 of the piezo stage 20. A gap G is formed between an upper surface of the piezo stage 20 and a lower surface of the second table 30.SELECTED DRAWING: Figure 1 |
