| 摘要 |
PROBLEM TO BE SOLVED: To reduce a warpage generated in a ceramic body while securing the reliability of the connection.SOLUTION: A sample holder 10 comprises a ceramic body 1 having a sample holding surface 11 on its upper surface and a concave portion 12 on its lower surface, an electrostatic attraction electrode 2 which spreads along the sample holding surface 11 and is buried in the ceramic body 1, a via hole conductor 4 extending from the electrostatic attraction electrode 2 to the lower surface side of the ceramic body 1, an electrode 5 which is connected to an end of the via hole conductor 4 on the lower surface side of the ceramic body 1 and is provided in a direction along the upper surface of the ceramic body 1 and at least a part of which is exposed in the recess 12, and a lead terminal 9 inserted into the recess 12 and connected to the electrode 5. The portion of the electrode 5 connected to the via hole conductor 4 is thicker than the portion connected to the lead terminal 9.SELECTED DRAWING: Figure 1 |
