XRF Analyzer for Light Element Detection

摘要

The invention includes an XRF analyzer with reduced x-ray attenuation between sample and target and between sample and detector. Attenuation can be reduced by removing atmospheric-air paths through which the x-rays must travel. Reduced x-ray attenuation can allow for easier detection of low-atomic-number elements. Cost saving can be achieved by reducing the number of x-ray windows.

主权项

1. An x-ray fluorescence (XRF) analyzer comprising:
a. an enclosure including an interior capable of having a single vacuum therein; b. a window, for transmission of x-rays, hermetically sealed to the enclosure; c. a source located within the interior of the enclosure, the source including an electron emitter and a target, and wherein:
i. the electron emitter is capable of emitting electrons towards the target;ii. the target is capable of emitting x-rays towards the window in response to impinging electrons;iii. the electron emitter and the target are electrically insulated from each other; d. a detector:
i. located within the interior of the enclosure;ii. facing the window and capable of receiving and detecting x-rays emitted through the window; and e. an analyzer electrically-coupled to the detector, the analyzer capable of receiving a signal from the detector, the signal based on x-rays impinging on the detector, and analyzing the signal to determine a material composition of the sample.