| 主权项 |
1. A table device comprising:
a first member movable in a horizontal plane; a second member relatively movable to the first member; a first guide device, at least a part of the first guide device being arranged in the first member, the first guide device guiding the second member such that the second member is moved in a direction parallel to a first axis perpendicular to the horizontal plane by movement of the first member; a table supported by the second member; a first movable member including a first upper surface, a first lower surface, and a first side surface connecting the first upper surface and the first lower surface, at least a part of the first movable member at a side of the first upper surface being connected to a first portion of the table; a second movable member including a second upper surface, a second lower surface, and a second side surface connecting the second upper surface and the second lower surface, at least a part of the second movable member at a side of the second upper surface being connected to a second portion of the table, the second portion being different from the first portion; a first bearing member forming a gas bearing between the first bearing member and the first side surface of the first movable member with a gas supplied between the first bearing member and the first side surface, and movably supporting the first movable member in a direction parallel to the first axis; a second bearing member forming a gas bearing between the second bearing member and the second side surface of the second movable member with a gas supplied between the second bearing member and the second side surface, and movably supporting the second movable member in the direction parallel to the first axis; an actuator generating power for moving the first member; and a gravity compensation device including a first supply portion that supplies a gas to a first space that the first lower surface of the first movable member faces, a first adjustment portion that adjusts an amount of the gas to be supplied from the first supply portion, a second supply portion that supplies a gas to a second space that the second lower surface of the second movable member faces, and a second adjustment portion that adjusts an amount of the gas to be supplied from the second supply portion, the gravity compensation device being able to adjust a pressure in the first space and a pressure in the second space. |
