| 摘要 |
PROBLEM TO BE SOLVED: To provide an electronic component transportation device being capable of performing control with high responsiveness while preventing or suppressing occurrence of noise due to harmonics, and an electronic component inspection device.SOLUTION: An inspection equipment 1 includes: a heater 30 supplied with electric power from an AC power source 85; a temperature sensor 40 detecting a temperature of the heater 30; an electric power adjustment section 83 adjusting the electric power supplied to the heater 30; and a frequency conversion section 84 enhancing a frequency of the electric power from the AC power source 85. Further, in the inspection device 1, the electric power adjustment section 83 controls the electric power supplied to the heater 30 by zero-cross control.SELECTED DRAWING: Figure 2 |
