发明名称 PROCESSOR
摘要 PROBLEM TO BE SOLVED: To provide a processor which can display the explanation information of a variety of setting items by selecting a support button, and in which erroneous process feed hardly immediately occurs even if the setting item for starting process feed is selected.SOLUTION: The processor comprises: a chuck table for holding a processed product; processing means for processing the processed product; and process feed means which relatively moves the chuck table and the processing means, and process-feeds them. The processor furthermore comprises: display means 56 which displays a variety of setting items related to operation control; input means which selects a variety of the displayed setting items, and inputs setting conditions; and storage means which stores the explanation information 68d of a variety of the setting items. When the display means displays the support button, and selects one of a variety of the setting items, the explanation information corresponding to the setting item which is selected before a start of drive is displayed at the display means even if the setting item is one in which a drive part including the process feed means starts drive by the selection.SELECTED DRAWING: Figure 4
申请公布号 JP2016215337(A) 申请公布日期 2016.12.22
申请号 JP20150104619 申请日期 2015.05.22
申请人 DISCO ABRASIVE SYST LTD 发明人 NAMIOKA SHINICHI;ISHIDA NAOMI
分类号 B23Q17/00;H01L21/301 主分类号 B23Q17/00
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