| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser processing method which prevents an interference fringe from being formed on a processing object region and which enables arbitrary setting of a processing width, and laser processing equipment.SOLUTION: A processing object region is processed by irradiating the processing object region with a laser beam via a condenser. A slit for controlling the processing width of the laser beam is provided. The slit has at least one of slit ends along a light-gathering direction inclined with respect to the light-gathering direction.SELECTED DRAWING: Figure 1 |
