| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin film capacitor with a small voltage drop.SOLUTION: A TiN layer 26 of a lower electrode layer 20 has an opening 26a formed by a conical inclined surface. A first via conductor 61D is in contact with the TiN layer 26 via a mortar-shaped opening 26a and mostly in contact with a W layer 24. The first via conductor 61D connected to the lower layer electrode layer 20 has a large contact area with respect to the W layer 24 having lower resistance than the high resistance TiN layer 26. The resistance value between the first via conductor 61D and the lower layer electrode layer 20 is lowered to reduce power loss and voltage drop.SELECTED DRAWING: Figure 5 |
