Method of Metrology, Inspection Apparatus, Lithographic System and Device Manufacturing Method

摘要

Disclosed is a method of determining a correction for measured values of radiation diffracted from a target comprising a plurality of periodic structures, subsequent to measurement of the target using measurement radiation defining a measurement field. The correction acts to correct for measurement field location dependence in the measured values. The method comprises performing a first and second measurements of the periodic structures; and determining a correction from said first measurement and said second measurement. The first measurement is performed with said target being in a normal measurement location with respect to the measurement field. The second measurement is performed with the periodic structure in a shifted location with respect to the measurement field, said shifted location comprising the location of another of said periodic structures when said target is in said normal measurement location with respect to the measurement field.

主权项

1. A method of determining a correction for measured values of radiation diffracted from a target subsequent to measurement of the target using measurement radiation defining a measurement field, said correction correcting for measurement field location dependence in said measured values, said target comprising a plurality of periodic structures, said method comprises:
performing a first measurement and a second measurement of at least one of said periodic structures; and determining a correction from said first measurement and said second measurement; wherein: said first measurement is performed with said target being in a normal measurement location with respect to the measurement field; and said second measurement is performed with the periodic structure in a shifted location with respect to the measurement field, said shifted location comprising the location of another of said periodic structures when said target is in said normal measurement location with respect to the measurement field.