| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device that can implement appearance inspection of substrates with high accuracy, and to provide a substrate processing device that includes the inspection device.SOLUTION: Front surface image data on a non-defect sample substrate and a substrate to be inspected is acquired. For pixels deemed to mutually correspond to the front surface image data on the substrates, a difference in a gradation value is calculated. A determination is made whether a value based on the calculated difference falls within a tolerable range. To set up the tolerable range, a difference in the gradation value between an i-th object pixel of the sample substrate and a plurality of pixels in a fixed area including the object pixel is calculated (step S101). An average value of the differences in the gradation value is determined as a representative value corresponding to the object pixel (step S101). The representative values for all of the object pixels are determined (steps S103 and S104), and a minimum value and maximum value of all of the representative value are set up as a lower limit value and upper limit value of the tolerable range, respectively (steps S105 and S106).SELECTED DRAWING: Figure 15 |
