发明名称 |
LIQUID DISCHARGE DEVICE, IMPRINT DEVICE AND MANUFACTURING METHOD OF COMPONENT |
摘要 |
PROBLEM TO BE SOLVED: To provide a liquid discharge device which can easily remove deposits on a discharge port surface.SOLUTION: A liquid discharge device comprises: a head which has a discharge port surface in which a discharge port row that arranges a plurality of discharge ports for discharging liquid in a first direction is installed; a suction port which performs suction operation for sucking the discharge port surface; and control means which moves the suction port in a second direction crossing a first direction while being alienated from the discharge port surface.SELECTED DRAWING: Figure 1 |
申请公布号 |
JP2016215544(A) |
申请公布日期 |
2016.12.22 |
申请号 |
JP20150104762 |
申请日期 |
2015.05.22 |
申请人 |
CANON INC |
发明人 |
ISHIBASHI TORU;TAKAHASHI YUICHI;ARAKI YOSHIMASA;MITA YUTAKA;ARAI TAKESHI |
分类号 |
B41J2/165;B29C59/02;B41J2/01;H01L21/027 |
主分类号 |
B41J2/165 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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