发明名称 LIQUID DISCHARGE DEVICE, IMPRINT DEVICE AND MANUFACTURING METHOD OF COMPONENT
摘要 PROBLEM TO BE SOLVED: To provide a liquid discharge device which can easily remove deposits on a discharge port surface.SOLUTION: A liquid discharge device comprises: a head which has a discharge port surface in which a discharge port row that arranges a plurality of discharge ports for discharging liquid in a first direction is installed; a suction port which performs suction operation for sucking the discharge port surface; and control means which moves the suction port in a second direction crossing a first direction while being alienated from the discharge port surface.SELECTED DRAWING: Figure 1
申请公布号 JP2016215544(A) 申请公布日期 2016.12.22
申请号 JP20150104762 申请日期 2015.05.22
申请人 CANON INC 发明人 ISHIBASHI TORU;TAKAHASHI YUICHI;ARAKI YOSHIMASA;MITA YUTAKA;ARAI TAKESHI
分类号 B41J2/165;B29C59/02;B41J2/01;H01L21/027 主分类号 B41J2/165
代理机构 代理人
主权项
地址