| 主权项 |
1. A system for monitoring one or more conditions of an automation system of a semiconductor factory comprising:
one or more instrumented substrates, wherein the one or more instrumented substrates include one or more sensors, wherein the one or more sensors are configured to measure one or more conditions of the one or more instrumented substrates as the one or more instrumented substrates traverse one or more portions of the semiconductor factory, wherein the one or more instrumented substrates include substrate communication circuitry and one or more processors communicatively coupled to the one or more sensors and the substrate communication circuitry; one or more sealable containers configured to transport the one or more instrumented substrates through the semiconductor factory, wherein the one or more sealable containers include container communication circuitry, wherein the container communication circuitry is communicatively couplable to the substrate communication circuitry, wherein the container communication circuitry is configured to receive sensor data from the one or more sensors of the one or more instrumented substrates via the substrate communication circuitry; and one or more system servers, wherein the one or more system servers include server communication circuitry, wherein the server communication circuitry is communicatively couplable to the one or more sealable containers, wherein the server communication circuitry is configured to receive the sensor data from the container communication circuitry, wherein the one or more system servers are configured to identify one or more deviations in the measured one or more conditions of the one or more instrumented substrates. |
