SYSTEMS AND METHODS FOR CALIBRATING SCALAR FIELD CONTRIBUTION VALUES FOR A LIMITED NUMBER OF SENSORS INCLUDING A TEMPERATURE VALUE OF AN ELECTROSTATIC CHUCK AND ESTIMATING TEMPERATURE DISTRIBUTION PROFILES BASED ON CALIBRATED VALUES

摘要

A system including a controller, an interface, and a calibration controller. The controller is configured to (i) select a set of fields, and (ii) based on the set of fields, supply control effort to first actuators in zones of a chamber. The interface is configured to receive feedback signals from sensors. The feedback signals are indicative of fields respectively of the zones. The controller is configured to adjust an amount of control effort supplied to the actuators based on the fields. The calibration controller is configured to, based on the fields, generate calibration values for each of the sensors. The calibration values for each of the sensors are indicative of field contributions corresponding respectively to the actuators.

主权项

1. A system comprising:
a first controller configured to (i) select a first set of fields, and (ii) based on the first set of fields, supply control effort to a first plurality of actuators in a first plurality of zones of a chamber; a first interface configured to receive a plurality of feedback signals from a first plurality of sensors, wherein the plurality of feedback signals are indicative of a first plurality of fields respectively of the first plurality of zones; wherein the first controller is configured to adjust an amount of control effort supplied to the first plurality of actuators based on the first plurality of fields; and a calibration controller configured to, based on the first plurality of fields, generate a plurality of calibration values for each of the first plurality of sensors, wherein the plurality of calibration values for each of the first plurality of sensors are indicative of field contributions corresponding respectively to the first plurality of actuators.