发明名称 塗布膜形成装置
摘要 PROBLEM TO BE SOLVED: To provide a coating film forming device capable of varying a specification of film thickness distribution of an application film formed in a pixel region.SOLUTION: In a coating film forming device 10, a region surrounded by a partition wall is a pixel region, and a substrate in which pixel regions are aligned in a main scanning direction that is one direction and in a sub-scanning direction orthogonal to the main scanning direction, is used. The coating film forming device 10 comprises: a nozzle for emitting liquid-columnar ink toward a substrate; a main scanning section 34 for relatively moving the nozzle and the substrate in the main scanning direction; a sub-scanning section 35 for moving the nozzle on the substrate in the sub-scanning direction; a drive control section 33 for alternately driving the sub-scanning section 35 and the main scanning section 34; and a temperature control section 40 for adjusting a temperature of the ink to a target dry temperature that is lower than an atmospheric temperature on the substrate.
申请公布号 JP5982952(B2) 申请公布日期 2016.08.31
申请号 JP20120077881 申请日期 2012.03.29
申请人 凸版印刷株式会社 发明人 小谷 雅幸;宮本 慎一
分类号 H05B33/10;B05C5/00;B05C9/10;B05C11/10;H01L51/50;H05B33/12;H05B33/22 主分类号 H05B33/10
代理机构 代理人
主权项
地址