| 摘要 |
A differential transformer magnetic permeability sensor (3) includes a substrate (30), a drive coil (41, 42), a first differential coil (43), a second differential coil (44), a first interconnection pattern (5A), and a second interconnection pattern (5B). The first differential coil (43) is disposed at a side of a first surface (3A) of the substrate, and an induced voltage is generated therein when the drive coil (41, 42) is driven. The second differential coil (44) is disposed at a side of a second surface (3B) of the substrate, and an induced voltage is generated therein when the drive coil (41, 42) is driven. The first interconnection pattern (5A) is located on the first surface (3A) and allows the first differential coil (43) to serve as a reference coil, and the second differential coil (44) as a sensing coil. The second interconnection pattern (5B) is located on the second surface (3B) and allows the second differential coil (44) to serve as a reference coil, and the first differential coil (43) as a sensing coil. |
