发明名称 半導体発光素子の製造方法
摘要 A method of manufacturing a semiconductor light emitting element includes preparing a semiconductor stacked layer structure by stacking a first semiconductor layer and a second semiconductor layer in this order, forming a second electrode and an insulating layer in this order on the second semiconductor layer, exposing the first semiconductor layer by removing a part of the second semiconductor layer, forming a first electrode by forming a metal layer on the exposed first semiconductor layer and the insulating layer and flattening a surface of the metal layer, forming a first electrode-side bonding layer having a top layer made of Au on the first electrode, preparing a support substrate including a support substrate-side bonding layer having a top surface made of Au, and bonding the first electrode-side bonding layer and the support substrate-side bonding layer.
申请公布号 JP5983125(B2) 申请公布日期 2016.08.31
申请号 JP20120159152 申请日期 2012.07.18
申请人 日亜化学工業株式会社 发明人 松村 拓明;阿部 隆;中川 恭輔
分类号 H01L33/02;H01L33/48 主分类号 H01L33/02
代理机构 代理人
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