| 摘要 |
PROBLEM TO BE SOLVED: To provide a sheet type epitaxial wafer-manufacturing device capable of preventing position shift of a susceptor at heating, and to provide an epitaxial wafer-manufacturing method using the same.SOLUTION: A sheet type epitaxial wafer-manufacturing device includes: a susceptor 14 provided with a wafer pocket 12 for placing a wafer at a central part of an upper surface; and a supporting shaft 16 supporting and rotating the susceptor 14. The supporting shaft 16 comprises: a rotatable main support pillar 18; and a plurality of arm parts 20 provided to the main support pillar 18, and supporting a lower surface of the susceptor 14. The susceptor 14 has a plurality of susceptor recessed parts 22 on a lower surface of the susceptor. Each arm part 20 has a quartz head part 24 for vertically supporting the lower surface of the susceptor. At least a part of the quartz head part 24 is made tightly fit the susceptor recessed part 22 without a play space, and made contact with a width-direction inner surface of the susceptor recessed part 22. |
