CANTILEVER PIEZOELECTRIC TRANSDUCER

摘要

A piezoelectric transducer includes: an anchorage (16a); a beam (25) of semiconductor material, extending in cantilever fashion from the anchorage (16a) in a main direction parallel to a first axis (Y) and having a face (25c) parallel to a first plane (XY) defined by the first axis (Y) and by a second axis (X) perpendicular to the first axis (Y); and a piezoelectric layer (26) on the face (25c) of the beam (25). A cross-section of the beam (25; 125; 225; 325) perpendicular to the first axis (Y) is asymmetrical and is shaped so that the beam (25) presents deformations out of the first plane (XY) in response to forces applied to the anchorage (16) and oriented according to the first axis (X).