| 摘要 |
The present invention provides a stator disk including a connection hole for improving exhaust efficiency in a vacuum pump including a Seigbahn type molecular pump portion, and a vacuum pump including the stator disk. The vacuum pump according to an embodiment of the present invention includes a Seigbahn type molecular pump portion and includes, in a stator disk disposed therein, a connection hole that connects an upper space (an inlet port side region, an upstream side region) with a lower space (an outlet port side region, a downstream side region) in the axial direction of the stator disk. |
