| 摘要 |
A vacuum chamber system of a coating apparatus and a coating method using the same that prevents the attraction phenomenon of a coating solution in intermittent coating, so that the failure rate of coating is reduced, thereby improving the quality of products. In one embodiment, a vacuum chamber system of a coating apparatus includes a vacuum chamber connected to a coating solution outlet of the coating apparatus. A negative pressure generating unit is connected to one region of the vacuum chamber to generate negative pressure. A buffer tank is provided between the vacuum chamber and the negative pressure generating unit. In the vacuum chamber system, a control unit is further provided between the vacuum chamber and the buffer tank. The control unit controls air to be selectively drawn into or blocked from the vacuum chamber and the negative pressure generating unit. |
