发明名称 GAS SENSOR AND MANUFACTURING METHOD THEREOF
摘要 PROBLEM TO BE SOLVED: To detect a gas of a ppb-level concentration, such as the concentration of a gas molecule in an expired gas, for example, with high sensitivity.SOLUTION: Provided is a gas sensor comprising a lower metal electrode 1, a detection layer 2 for detecting a gas and disposed on the lower metal electrode, and an upper metal electrode 3 disposed on the detection layer, the detection layer being provided with a barrier layer 21 consisting of a material having a smaller electron affinity than the work function of graphene, and a first graphene layer 22 laminated on the barrier layer, the upper metal electrode being disposed so that the first graphene layer is partially exposed.SELECTED DRAWING: Figure 1
申请公布号 JP2016151456(A) 申请公布日期 2016.08.22
申请号 JP20150028438 申请日期 2015.02.17
申请人 FUJITSU LTD 发明人 HARADA NAOKI
分类号 G01N27/12 主分类号 G01N27/12
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