| 摘要 |
PROBLEM TO BE SOLVED: To manufacture an optical waveguide element with high uniformity, which gives desired characteristics, in a high yield.SOLUTION: A method for manufacturing an optical waveguide element includes: an optical waveguide forming step of forming a core region to serve as an optical waveguide and forming a slab region thinner than the core region on both sides of the core region, by using silicon including a first conductive impurity element, on an oxide layer of a substrate having the oxide layer formed thereon; an oxide film side wall forming step of forming one oxide film side wall part made of an oxide film on one side of side walls of the core region; a resist pattern forming step of forming a resist pattern to cover one slab region of the slab regions formed on both sides of the core region; and an ion injection step of injecting an ion of a second conductive impurity element into a region including an upper part of the core region. |
